Ownership Submission
FORM 3
 UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
  Blake Lynn Larson
 2. Date of Event Requiring Statement (Month/Day/Year)
02/24/2010		 3. Issuer Name and Ticker or Trading Symbol
ENTEGRIS INC [ENTG]
(Last)
(First)
(Middle)
9728 LAFORET DRIVE		 4. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
Vice President, Finance, CAO
 5. If Amendment, Date Original Filed(Month/Day/Year)
03/01/2010
(Street)

EDEN PRAIRIE, MN 55347		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Beneficially Owned
1.Title of Security
(Instr. 4)		 2. Amount of Securities Beneficially Owned
(Instr. 4)		 3. Ownership Form: Direct (D) or Indirect (I)
(Instr. 5)		 4. Nature of Indirect Beneficial Ownership
(Instr. 5)
Common Stock 66,698 (1)
D
 
Common Stock 10,000
I
By trust with spouse

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 4)		 2. Date Exercisable and Expiration Date
(Month/Day/Year)		 3. Title and Amount of Securities Underlying Derivative Security
(Instr. 4)		 4. Conversion or Exercise Price of Derivative Security 5. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 5)		 6. Nature of Indirect Beneficial Ownership
(Instr. 5)
Date Exercisable Expiration Date Title Amount or Number of Shares
Employee Stock Option (right to buy)   (2) 02/21/2015 Common Stock 19,600 $ 7.07 D  
Employee Stock Option (right to buy)   (3) 02/19/2016 Common Stock 72,000 $ 1.13 D  
Employee Stock Option (right to buy)   (4) 02/19/2017 Common Stock 29,330 $ 5.4 D  

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
Blake Lynn Larson
9728 LAFORET DRIVE
EDEN PRAIRIE, MN 55347		       Vice President, Finance, CAO  

Signatures

Peter W. Walcott, Attorney-in-Fact for Lynn L. Blake 11/15/2010
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 5(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) The March 1, 2010 filing on Form 3 is being updated to reflect an overstatement in direct holdings at 25,058 shares.
(2) This option is exercisable in three equal annual installments. The first installment became exercisable on 2/21/2009, the second installment became exercisable on 2/21/2010 and the last installment becomes exercisable on 2/21/2011.
(3) This option is exercisable in three equal annual installments. The first installment became exercisable on 2/19/2010, the second installment becomes exercisable on 2/19/2011 and the last installment becomes exercisable on 2/19/2012.
(4) This option is exercisable in three equal annual installments. The first installment becomes exercisable on 2/19/2011, the second installment becomes exercisable on 2/19/2012 and the last installment becomes exercisable on 2/19/2013.

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