FORM 3

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 INITIAL STATEMENT OF BENEFICIAL OWNERSHIP OF SECURITIES Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person *   Marshall Gregory Bryan 2. Date of Event Requiring Statement (Month/Day/Year) 05/07/2014 3. Issuer Name and Ticker or Trading Symbol ENTEGRIS INC [ENTG] (Last) (First) (Middle) 62 CHESTNUT ROAD 4. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director _____ 10% Owner __X__ Officer (give title below) _____ Other (specify below) VP, Quality EHS Data Mgmt 5. If Amendment, Date Original Filed(Month/Day/Year) (Street) TYNGSBORO, MA 01879 6. Individual or Joint/Group Filing(Check Applicable Line) _X_ Form filed by One Reporting Person ___ Form filed by More than One Reporting Person (City) (State) (Zip) Table I - Non-Derivative Securities Beneficially Owned

1.Title of Security (Instr. 4) 2. Amount of Securities Beneficially Owned (Instr. 4) 3. Ownership Form: Direct (D) or Indirect (I) (Instr. 5) 4. Nature of Indirect Beneficial Ownership (Instr. 5) Common Stock 18,735.838 (1) (2) D Â

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.			SEC 1473 (7-02)
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Table II - Derivative Securities Beneficially Owned (e.g., puts, calls, warrants, options, convertible securities)

1. Title of Derivative Security (Instr. 4)	2. Date Exercisable and Expiration Date (Month/Day/Year)		3. Title and Amount of Securities Underlying Derivative Security (Instr. 4)		4. Conversion or Exercise Price of Derivative Security	5. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 5)	6. Nature of Indirect Beneficial Ownership (Instr. 5)
	Date Exercisable	Expiration Date	Title	Amount or Number of Shares
Employee Stock Option (Right to Buy)	  (3)	02/19/2020	Common Stock	11,056	$ 9.88	D	Â
Employee Stock Option (Right to Buy)	  (4)	02/19/2021	Common Stock	15,084	$ 11.71	D	Â

Reporting Owners

Reporting Owner Name / Address	Relationships
	Director	10% Owner	Officer	Other
Marshall Gregory Bryan 62 CHESTNUT ROAD TYNGSBORO, MA 01879	Â	Â	  VP, Quality EHS Data Mgmt	Â

Signatures

/s/ Peter W. Walcott, Attorney-In-Fact for Gregory B. Marshall		05/16/2014
**Signature of Reporting Person		Date

Explanation of Responses:

*	If the form is filed by more than one reporting person, see Instruction 5(b)(v).
**	Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1)	These shares include a total of 11,328 restricted stock units granted on February 22, 2011, February 15, 2012, February 12, 2013 and February 11, 2014 with restrictions that lapse as follows: (i) 5,460 shares vest on February 19, 2015, (ii) 3,460 shares vest February 19, 2016, (iii) 1,558 shares vest on February 19, 2017, and (iv) 850 shares vest on February 19, 2018.
(2)	These shares include 2,064.838 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan.
(3)	This option vests in four equal annual installments. The first installment became exercisable on February 19, 2014 and the next three installments become exercisable on February 19, 2015, February 19, 2016 and February 19, 2017, respectively.
(4)	This option vests in four equal annual installments. The first installment becomes exercisable on February 19, 2015 and the next three installments become exercisable on February 19, 2016, February 19, 2017 and February 19, 2018, respectively.

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